Acquisition of Atonarp Inc.
Acquisition of Atonarp Inc.
July 22, 2026, VAT Group has agreed to acquire 100% of Atonarp Inc. for around CHF 110 million to enable chamber monitoring and real-time semiconductor process control.
The technology addition comprises a family of miniaturized sensors and complements VAT’s existing core valve and adjacencies business. As semiconductor manufacturing advances into sub-2nm node sizes, precise real-time monitoring equipment is becoming critical to avoid process deviations and protect chip manufacturing yields. The transaction continues the VAT’s growth strategy announced at the Capital Markets Day in 2025, allowing VAT to extend its share of wallet over time. The acquisition highlights the increasing strategic importance of sensor technology, real-time data and automated process control in the semiconductor industry.
Japan-based Atonarp Inc., is a pioneer in real-time molecular profiling for advanced semiconductor and industrial processes.
VAT is a global leader in the development of high-vacuum solutions that are essential for the manufacture of semiconductors, displays, and digital technologies.
The COVENDIT team led by Bernhard Kluge and Ben Vormwald supported VAT in this transaction.
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Bernhard Kluge
kluge@covendit.de
Ben Vormwald
vormwald@covendit.de